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Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof
Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof
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机译:具有公共接地平面层和一组接触齿的微机电装置及其制造方法
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摘要
The present invention relates to MEM switches. More specifically, the present invention relates to a system and method for making MEM switches having a common ground plane. One method for making MEM switches includes: patterning a common ground plane layer on a substrate; forming a dielectric layer on the common ground plane layer; depositing a DC electrode region through the dielectric layer to contact the common ground plane layer; and depositing a conducting layer on the DC electrode region so that regions of the conducting layer contact the DC electrode region, so that the common ground plane layer provides a common ground for the regions of the conducting layer.
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