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Stage device with frame-shaped member movable in at least three degrees of freedom within a two-dimensional plane
Stage device with frame-shaped member movable in at least three degrees of freedom within a two-dimensional plane
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机译:具有在二维平面内可在至少三个自由度中移动的框架形构件的载物台装置
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摘要
A stage device includes a stage and a frame-shaped member that move in three degrees of freedom directions in a two-dimensional plane while floating above a surface plate. The stage also holds an object. First fixed elements and second fixed elements are fitted to the frame-shaped member, and cooperate with first movable elements and second movable elements to generate drive forces to drive the stage in the two-dimensional plane. A reaction force generated by the driving of the stage acts on the first and/or second fixed elements, and causes the frame-shaped member to move in the two-dimensional plane. Because the reaction force caused by the movement of the stage is substantially completely cancelled, and because the movement of a center of gravity of a system including the stage and the frame-shaped member does not occur, no unbalanced load acts on the surface plate.
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