'Device and method for locally producing microwave plasmas'

摘要

The invention relates to a device for locally producing microwave plasma. Said device comprises at least one microwave supply that is surrounded by at least one dielectric tube (1). At least one of the dielectric tubes, preferably the outer dielectric tube, is partially surrounded by metal cladding (2). A locally delimited plasma is produced by means of the above-mentioned device by shielding microwaves.