PROCESS FOR MAKING A SILICON-INTEGRATED BIO-SENSOR, WITH OPTICAL DETECTION, WITH WAVE GUIDE MADE OF POLYMERS

摘要

The invention relates to a process for making a silicon-integrated bio-sensor with optical detection. According to the invention, the process consists in thermal oxidation of a silicon plate with 111-type crystallographic orientation, by increasing a SiO2 layer up to a thickness of approximately 1.7 microns, deposition, by centrifugation, of a negative photoresist, which will be the core of a wave guide, the application of a specific thermal treatment and the application of a chrome mask for defining the width of the wave guide core and establishing a configuration of Mach-Zehnder interferometer, followed by a deposition, by centrifugation, of positive photoresist, which will be the wave guide coating, by a specific thermal treatment, and, in the end, by the opening, by means of a mask, of a rectangular window, in the positive photoresist layer, which allows the performance of a direct contact, between a biological material, to be analyzed, and the wave guide core.