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COMPENSATION OF EFFECTS OF ATMOSPHERIC PERTURBATIONS IN OPTICAL METROLOGY
COMPENSATION OF EFFECTS OF ATMOSPHERIC PERTURBATIONS IN OPTICAL METROLOGY
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机译:光学计量学中大气扰动的补偿
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摘要
In general, in a first aspect, the invention features a method that includes using an interferometry assembly to provide three different output beams, each output beam including an interferometric phase related to an optical path difference between a corresponding first beam and a corresponding second beam, each first beam contacting a measurement object at least once, monitoring the interferometric phases for each of the three different output beams, and deriving information about variations in the optical properties of a gas in the first beam paths from the three monitored phases.
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