SHORT WAVELENGTH ULTRAVIOLET DISCHARGE LAMP AND ULTRAVIOLET IRRADIATION TREATMENT APPARATUS

摘要

This invention provides a short wavelength ultraviolet discharge lamp for emitting ultraviolet light with a wavelength of not more than 220 nm, comprising an insulating conductor, which can suppress the generation of a halide from an insulator in the insulating conductor. The discharge lamp comprises a quartz glass tube (31), a pair of electrodes (32a, 32b) disposed at its both ends, and an insulating conductor (38) extended along the outer wall of the quartz glass tube. The insulating conductor is covered with a nonhalogen-type insulator. By virtue of this, even when the insulating conductor is exposed to ultraviolet light, any halide whichposes safety and environmental protection problems is not generated. In particular, when a polymer compound having an aromatic ring or a heterocyclic ring in its main chain is used as the insulator, the deterioration resistance can be improved.