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METHOD FOR BONDING RESIN BY VACUUM ULTRAVIOLET IRRADIATION, PROCESS FOR PRODUCING RESIN ARTICLE OR MICROCHIP USING THE METHOD, AND RESIN ARTICLE OR MICROCHIP PRODUCED BY THE PROCESS.
METHOD FOR BONDING RESIN BY VACUUM ULTRAVIOLET IRRADIATION, PROCESS FOR PRODUCING RESIN ARTICLE OR MICROCHIP USING THE METHOD, AND RESIN ARTICLE OR MICROCHIP PRODUCED BY THE PROCESS.
Disclosed is a method for bonding resins to each other with high productivity at a temperature below a temperature necessary for bonding by heat sealing. The method for binding resins to each other is a method for bonding a first resin (1) and a second resin (2) to each other. The method comprises a step (I) of irradiating a space (10) containing oxygen molecules in contact with surfaces (3a, 3b) of the first and second resins with vacuum ultraviolet light having a wavelength of not more than 175 nm and a step (II) of raising the temperature in such a state that the surfaces (3a, 3b) after the irradiation are in contact with each other, to bond the first resin (1) and the second resin (2) to each other using the surfaces (3a, 3b) as bonding surfaces. In step (I), the surfaces (3a, 3b) of the first and second resins may be further irradiated with vacuum ultraviolet light. In this case, the light intensity of the vacuum ultraviolet light which reaches the surfaces (3a, 3b) is preferably, for example, not less than 0.1 J/cm2 and not more than 10 J/cm2.
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机译:公开了一种在低于通过热封进行粘合所需的温度的温度下以高生产率将树脂彼此粘合的方法。使树脂彼此粘合的方法是使第一树脂(1)和第二树脂(2)彼此粘合的方法。该方法包括以下步骤(I):用波长不超过175 nm的真空紫外光照射与第一和第二树脂的表面(3a,3b)接触的含氧分子的空间(10),以及步骤(I) II)以在辐照后的表面(3a,3b)彼此接触的状态下升高温度,以使第一树脂(1)和第二树脂(2)利用该表面彼此粘合(图3a,3b)作为粘结表面。在步骤(I)中,第一和第二树脂的表面(3a,3b)可以进一步用真空紫外光照射。在这种情况下,到达表面(3a,3b)的真空紫外线的光强度例如优选为0.1J / cm 2以上且10J / cm 2以下。
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