首页> 外国专利> SURFACE PLASMON RESONANCE AND QUARTZ CRYSTAL MICROBALANCE SENSOR

SURFACE PLASMON RESONANCE AND QUARTZ CRYSTAL MICROBALANCE SENSOR

机译:表面等离子体共振和石英晶体微平衡传感器

摘要

A sensor chip assembly for use in a sensor capable of Surface Plasmon Resonance (SPR) and gravimetric sensing. The assembly comprising a transparent piezoelectric substrate (1) having a first surface and a second surface opposite to the first surface. The assembly also comprising first and second thin film metal electrodes (2,3) respectively provided on the first and second surfaces of the substrate (1). The second thin film metal electrode (3) being position on the second surface of the substrate (1) such that a light beam is capable of being transmitted through the second surface of the substrate and reflected from the first thin film metal electrode. The assembly also comprising an attenuated total reflection (ATR) coupler (11) disposed adjacent to the second thin film metal electrode (3).
机译:用于能够进行表面等离子共振(SPR)和重量感测的传感器中的传感器芯片组件。该组件包括透明压电基板(1),该透明压电基板具有第一表面和与该第一表面相对的第二表面。该组件还包括分别设置在基板(1)的第一和第二表面上的第一和第二薄膜金属电极(2,3)。第二薄膜金属电极(3)位于基板(1)的第二表面上,使得光束能够透射穿过基板的第二表面并从第一薄膜金属电极反射。该组件还包括邻近于第二薄膜金属电极(3)设置的衰减全反射(ATR)耦合器(11)。

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