Vacuum coating facility and calotte comprising a device for holding and turning and/or rotating an object, and method thereof.

摘要

The device for supporting and for the rotation and/or inversion of an optical element e.g. a lens (2) or a non-optical element e.g. a tool in a vacuum coating plant, comprises an individual support (3) for the element, and a direct drive unit (9) assigned to the support for the rotation and/or inversion of the element. The drive unit comprises a transmission mechanism (4), a single or multi-functional vacuum-suited control and/or regulation mechanism, and piezoelectric miniature motors and/or piezoelectric actuators. The device for supporting and for the rotation and/or inversion of an optical element e.g. a lens (2) or a non-optical element e.g. a tool in a vacuum coating plant, comprises an individual support (3) for the element, and a direct drive unit (9) assigned to the support for the rotation and/or inversion of the element. The drive unit comprises a transmission mechanism (4), a single or multi-functional vacuum-suited control and/or regulation mechanism, and piezoelectric miniature motors and/or piezoelectric actuators. The transmission mechanism is a rack-and-pinion gear and/or a spur gear and/or a worm gear and/or planetary gear and/or a ball transmission and/or a harmonic drive transmission. A friction mechanism (6) is intended for transmitting the driving power and/or the drive moment of the drive unit on to the individual support. The individual support and the drive unit are indirectly or directly connectable with one another as a positive and/or non-positive and/or position-oriented geometrical closure. A positioning mechanism is intended to bring the individual support to a pre-determined position during rotation and/or inversion, comprises a stop element, against which the individual support collides during rotation and/or inversion and is activatable and/or deactivatable. A locking mechanism is intended to lock the positioned individual support in a pre-determined position. A transformation mechanism is intended for the linear movement of the linear motors into a rotation and/or inversion movement and comprises a gear rack and a cooperating gear wheel. The piezoelectric miniature motor exhibits an elliptically oscillating motor locus, which is non-positively friction connected with a friction wheel and/or a friction bar. An attachment mechanism is intended for the detachable fastening to a hemispherical concavity and comprises an adjustment mechanism to fix the position of the device with respect to the hemispherical concavity. The individual support exhibits two splices, at which the optical element is attached. Independent claims are included for: (1) a hemispherical concavity provided with devices; and (2) a procedure for supporting and for the rotation and/or inversion of an optical element e.g. a lens or a non-optical element e.g. a tool.