APPARATUS FOR ENRICHING AND PURIFYING WASTE HELIUM GASES

摘要

An apparatus for concentrating and purifying waste helium gases is provided to improve facility investment and concentration cost by increasing enriching efficiency of helium in a small space while safely removing impurities contained in mixed gas in a process of enriching helium and purifying the enriched helium, and minimize loss of gas to be purified including helium generated during heating and purging by increasing heat supply efficiency of a nitrogen type regenerating coil and combining a vacuum pump with the apparatus. An apparatus for concentrating and purifying waste helium gases comprises: a helium enriching tower(EC-101) cooling waste helium mixed gas to about a liquefaction temperature of nitrogen, thereby liquefying impurity-contained gas to remove impurities and produce helium enriched gas; and a low temperature adsorption/desorption machine including an inner cylinder through which the helium enriched gas passes, which adsorbs condensed impurities contained in the helium enriched gas passing through the inner cylinder, and which is filled with molecular sieves from which the impurities are vaporized and desorbed when the adsorbed impurities are heated, and heating coils through which heated gas flows along a passage separated from the inner cylinder to heat the molecular sieves of the inner cylinder, and which are disposed to be uniformly distributed on the molecular sieves.