ORIGINAL PLATE DATA GENERATION METHOD, ORIGINAL PLATE GENERATION METHOD, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM FOR GENERATING ORIGINAL PLATE DATA

摘要

An original plate data generation method is provided to improve resolution of the exposure apparatus and throughput by using a projection optical system after illuminating the disk with illumination light. An original plate data generation method is comprised of steps: calculating a function displaying optical strength distribution formed on hollow plane of the projection optical system and two dimension reciprocity transmission coefficient based on the hollow function; calculating an aerial image by approximating at least one component of a plurality of component on the projection optical system based on the first pattern in the object plane of calculated two dimension reciprocity transmission coefficient; manufacturing a first pattern and other pattern having the auxiliary pattern based on the approximation aerial image.