METHOD OF MANUFACTURING GRAYTONE MASK AND GRAYTONE MASK, AND INSPECTION METHOD OF GRAYTONE MASK, AND PATTERN TRANSFER METHOD

摘要

A method for preparing a gray tone mask, a method for testing a gray tone mask, a gray tone mask prepared by the method, and a pattern transfer method using the gray tone mask are provided to improve the precision of pattern transfer by evaluating the deviation of alignment quantitatively. A method for preparing a gray tone mask comprises the steps of preparing a gray tone mask blank in which a first layer is formed on a transparent substrate(24); patterning the resist film(27) formed on the first film to form a first resist pattern; etching the first film by using the first resist pattern as a mask and forming a first layer pattern; forming a second layer on the surface containing first layer pattern on the transparent substrate where the first resist pattern is removed; patterning the resist film formed on the second layer to form a second resist pattern(28); and etching the second layer by using the second resist pattern as a mask and forming a second layer pattern.