METHOD FOR MANUFACTURING SPIRAL PIEZOELECTRIC ACTUATOR BY USE OF THERMOPLASTIC CO-EXTRUSION AND SPIRAL PIEZOELECTRIC ACTUATOR AND MICROMINI ULTRASONIC MOTOR MANUFACTURED THEREBY

摘要

A method for manufacturing a spiral piezoelectric actuator using a thermoplastic material and the spiral piezoelectric actuator, and a micromini ultrasonic motor are provided to obtain a sufficient piezoelectric characteristic by performing the sintering using the thermoplastic property after making one feedrod composed of a piezoelectric element and an inert compound and extruding the feedrod through co-extrusion method. The pulverized PZN-PZT powder sintered at low temperature is made by mixing PZN made of Pb, Zn, and Nb and PZT made of Pb, Zn, and (Ti) with a predetermined ratio(S1). A piezoelectric element is made by adding polymer to the PZN-PZT powder(S2). A compound is made by adding the polymer after mixing the PZN-PZT power with Ag(S3). After forming the feedrod with a square pillar of the piezoelectric actuator composed of two-layer plate shape by co-extruding the piezoelectric element and the compound, the feedrod is cut(S4). The feedrod with a predetermined size is processed with a spiral shape in a furnace(S5). The spiral piezoelectric actuator composed of a piezoelectric layer and a compound layer is formed by performing the sintering at high temperature while combusting the polymer by heating the spiral feedrod at high temperature(S6).