STANDING WAVE MEASURING UNIT IN WAVEGUIDE AND STANDING WAVE MEASURING METHOD, ELECTROMAGNETIC WAVE USING DEVICE, PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

摘要

[PROBLEMS] To accurately measure a standing wave as an index to identify the waveguide length Ug in a waveguide. [MEANS FOR SOLVING PROBLEMS] By detecting temperature distribution of a conductive member constituting at least a part of a pipe wall of a waveguide in the longitudinal direction of the waveguide for propagation of an electromagnetic wave, a standing wave generated in the waveguide is measured according to the temperature distribution. The temperature distribution of the conductive member in the longitudinal direction of the waveguide can be accurately measured by temperature sensors arranged in the longitudinal direction of the waveguide, or a temperature sensor moving in the longitudinal direction of the waveguide, or an infrared camera.