METHOD OF FABRICATION LIF OPTICAL REACTION CHAMBER TO DETECT TRANSCUTENEOUS PCO2 AND DETECTING SYSTEM THEREOF

摘要

A method of fabrication LiF optical reaction chamber to detect transcuteneous pCO2 and detecting system thereof can make the light reaction chamber more fine and simple by using the ductility etching method. The optical source section(100) radiates the middle infrared wavelength. The optical detecting part(300) detects the intensity of the light source of the specific wave reacting to the measurement target gas. The signal processing unit(400) converts the intensity of the light source detected through the optical detecting part into the electric signal. The LiF chamber forms pattern by using the ductility etching method. The bubble is removed under the vacuum atmosphere by diluting PDMS and elastomer.