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FLUID DISPENSERS AND METHODS FOR DISPENSING VISCOUS FLUIDS WITH IMPROVED EDGE DEFINITION

机译:改进了边缘清晰度的流体分配器和分配粘性流体的方法

摘要

Fluid dispensers (10,12,14) and methods for dispensing viscous fluids with improved edge definition. Pressurized fluid is periodically supplied in pulses to nozzles (80) in a nozzle plate (18) of a dispensing head as the dispensing head is moved by a multi-axis stage relative to a stationary substrate. Droplets are discharged from the nozzles (80) and impact on the substrate. The droplets coalesce together to define the coating. The discharge from one or more groups of nozzles (80) can be temporarily suspended to avoid coating a component or area on the substrate (120) while adjacent areas continue to receive droplets of the fluid.
机译:流体分配器(10、12、14)和分配具有改进的边缘清晰度的粘性流体的方法。当分配头通过多轴平台相对于固定基板移动时,加压的脉冲以脉冲形式周期性地供应到分配头的喷嘴板(18)中的喷嘴(80)。液滴从喷嘴(80)中排出并撞击到基板上。液滴聚结在一起以形成涂层。来自一个或多个喷嘴组(80)的排出物可以暂时中止以避免在基板(120)上涂覆组分或区域,同时相邻区域继续接收流体的液滴。

著录项

  • 公开/公告号KR20090045020A

    专利类型

  • 公开/公告日2009-05-07

    原文格式PDF

  • 申请/专利权人 NORDSON CORP.;

    申请/专利号KR20080104560

  • 发明设计人 WILLIAM L. HASSLER JR.;JON D. TEDROW;

    申请日2008-10-24

  • 分类号H01L21/60;H01L23/48;H01L23/52;

  • 国家 KR

  • 入库时间 2022-08-21 19:13:28

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