APPARATUS FOR INSPECTING HOMOGENEITY OF THE COEFFICIENT OF THE OPTICALLY INDUCED LINEAR BIREFRINGENCE IN THIN FILM

摘要

The present invention relates to an apparatus for inspecting homogeneity of a nonlinear coefficient in a sample. The apparatus comprises: a scanner arranged with a sample to be inspected and moving it along X and Y directions; a pumping system deriving birefringence by a light Kerr effect for the sample arranged on the scanner; an interferometer measuring the birefringence in the sample; and a control computer calculating the nonlinear coefficient values using the birefringence provided from the interferometer. The control computer receives the birefringence for all positions in the measurement region in the sample from the interferometer while moving the scanner in the X and Y directions along the measurement region in the sample, extracts the nonlinear coefficient values using the birefringence and the light source intensity values of the pumping system, and prepares and provides a 3D image using all the nonlinear coefficient values extracted for the measurement region in the sample. With the present invention, the nonlinear coefficients for the measurement region in the sample being the nonlinear medium are prepared and provided as the image, thereby making it possible to inspect the homogeneity of the nonlinear coefficient value.