SULFUR HEXAFLUORIDE RECYCLING SYSTEM AND METHOD FOR RECYCLING SULFUR HEXAFLUORIDE

摘要

The present invention relates to a system and method for the recycling of sulfur hexafluoride (SFSUB6/SUB), from a waste gas of a manufacturing process, such as a semiconductor processing method. In particular, the present invention provides a simplified system and method that utilizes additional SFSUB6 /SUBas a purge gas for the system pump and allows relatively easy separation of the SFSUB6 /SUBfrom the other waste gas components.