X-RAY FLUORESCENCE SPECTROMETER EQUIPPED WITH SEMICONDUCTOR CRYOGENIC DETECTOR

摘要

An X-ray fluorescence spectrometer with a semiconductor cryogenic detector is provided to minimize the current leakage of the detector by making a specific x-rays detection unit to be semiconductor crystal and diode structure. An X-ray fluorescence spectrometer with a semiconductor cryogenic detector comprises an X-rays generating unit, a sample mounting unit, a specific x-rays detection unit(300), and an ingredient indication unit(500). The X-rays generating unit generates X-rays in order to float an energy level of the atom comprising the sample. X-rays generating unit makes X-rays incident in the sample. The sample mounting unit settles down the sample. The X-rays generated enters the sample mounting unit from X-rays generating unit. The specific X-rays detection unit detects the specific X-lays using a compound semiconductor in which the energy band gap is 0.5Ev or less. The ingredient indication unit analyzes the component of the sample using the specific x-rays. The result is indicated.