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HEAD PART UP-DOWN STRUCTURE OF A RUBBING APPARATUS, PARTICULARLY FOR ENABLING A HIGH-ACCURATE LOCATION CONTROL
HEAD PART UP-DOWN STRUCTURE OF A RUBBING APPARATUS, PARTICULARLY FOR ENABLING A HIGH-ACCURATE LOCATION CONTROL
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机译:摩擦装置的头部上下结构,特别是用于实现高精度的位置控制
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摘要
PURPOSE: A head part up-down structure of a rubbing apparatus is provided to perform the up and down operation for a head unit of which weight is heavy with only minor power by adjusting the space between a stage and a rubbing roller.;CONSTITUTION: A head part-up-down structure of a rubbing apparatus includes a head up-down unit(5) and a support plate. The support plate is placed at the upper part of the main frame(1). An LM rail and an LM guide that forms a couple are attached to the each plane that the sliding block faces. A motor is connected to one side of a ball screw that is installed to restrict the rotation of the support plate between the sliding blocks. The ball screw is fixed to the sliding block.;COPYRIGHT KIPO 2010
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