HIGH-PURITY CARBON FIBER-REINFORCED CARBON COMPOSITE FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR PRODUCING THE SAME INCLUDING MATRIX HAVING CRYSTALLINE CARBON GROUP POWDER AND GLASSY CARBON AND CARBON FIBER

摘要

PURPOSE: A high-purity carbon fiber-reinforced carbon composite for a semiconductor manufacturing apparatus and a method for producing the same are provided to reduce corrosion of silver or copper alloy and to prevent contamination of silicon.;CONSTITUTION: A high-purity carbon fiber-reinforced carbon composite includes a matrix having crystalline carbon group powder and glassy carbon and carbon fiber. The content of sulfur is 5mass ppm or less. A manufacturing method of the carbon fiber-reinforced carbon composite includes a step for degassing the carbon fiber-reinforced carbon composite in an acclimatization furnace and a step for injecting halogen group gas to the carbon fiber-reinforced carbon composite. An acclimatization processing process further includes a hydrogen baking process of the carbon composite between steps.;COPYRIGHT KIPO 2010