A Measuring System For PRAM Fatigue Using Atomic Force Microscpoe And Homemade W Heater Tip And Controlling Method Thereof

摘要

A measuring system for PRAM fatigue using an atomic force microscpoe and homemade W heater tip and controlling method thereof are provided to perform fatigue test under the control of computer program to facilitate chalcogenide phase change substance. A measuring system for phase change random access memory(PRAM) fatigue comprises: a pulse generator(31) to generate repeating set/reset pulses; an atomic force microscope(AFM; 32) having a cell having a substance to cause phase change in response to the pulses; a parameter analyzer(33) to measure parameters according to the phase change of the cell; and a controller(34) to control the pulse generator, the AFM, and the parameter analyzer.