METHOD FOR OBTAINING PHYSICAL PROPERTIES OF MULTI LAYERED PERIODIC STRUCTURE

摘要

Propose a new method of nondestructive testing period structure. Measuring a physical quantity related to the reflectance or transmittance of the real periodic structure, and the physical quantity calculated by calculating the reflectance or transmittance of the virtual periodic structure is then compared to the measured physical quantity as this. The virtual periodic structure the zero-order (zero-th order) structure and obtain the zero-order structures the geometric or physical perturbation periodic structure varied, the zero-order calculating a physical quantity related to the reflectivity and transmittance of the light incident on the structure, and wherein the perturbation obtaining the green function of the zero-order structure in the region, Lipman-through shoe binggeo integral equation calculates a physical quantity related to the reflectivity and transmittance of the virtual periodic structure. The virtual periodic structure is to divide horizontally into a plurality of layers, from the segmented structure intermediate layer have at least three substances are repeated in the horizontal period. ; Cycle structure, surface, non-destructive testing