A precision diagnostic method for the failure protection and predictive maintenance of a vacuum pump and a precision diagnostic system therefor

摘要

A precision diagnostic method for a failure protection and a predictive maintenance of a vacuum pump and a system therefor are provided to improve stability and reliability of the predictive maintenance by using an in-situ evaluation method for obtaining a pump performance parameter of a new vacuum pump. State variables related to a pump operation of a new vacuum pump are collected with respect to an idle condition and various gas output conditions with a preset sampling speed. A maximum value and a minimum value are determined among time series values of the state variables from each set of continuously sampled signals, on a period longer than a dominant period of a state variable signal component that is changed at the idle condition and the various gas output condition. A pump operation characteristic value is estimated by using an adaptive diagnostic algorithm based on a parameter model of the idle condition and the various gas output condition. A pump performance parameter of the new vacuum pump is obtained by using an in-situ evaluation method. The estimated pump operation characteristic value and pump performance evaluation parameters are stored in a database. In order to determination whether or not the pump is required to be replaced, the estimated pump operation characteristic value and the pump performance evaluation parameters stored in the database are compared with an estimated pump operation characteristic value and a pump performance evaluation parameter under an abnormal operation condition.