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Disk-shaped piezoelectric actuator as a piezoelectric ultrasonic linear motor using the same, and a method of producing
Disk-shaped piezoelectric actuator as a piezoelectric ultrasonic linear motor using the same, and a method of producing
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机译:盘状压电致动器作为使用该压电致动器的压电超声波线性电动机及其制造方法
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摘要
A piezoelectric actuator, a piezoelectric ultrasonic linear motor using the same and a method for manufacturing the same are provided to improve control precision within a large displacement by directly moving an object. A piezoelectric layer(11) and a multiple layer(12) are integrally formed by a high temperature sintering process and a hole(13) is punched in the center. A piezoelectric actuator of a disk-type, uni-morph type, is polarized to a thickness direction thereof and moves to front and back surfaces when voltage is applied.
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