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Clamping device and positioning BATH EVAPORATOR
Clamping device and positioning BATH EVAPORATOR
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机译:夹紧装置和定位BATH EVAPORATOR
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摘要
The invention relates to a vacuum treatment plant having an evaporator (1) for vacuum coating plants. The evaporator (1) according to the invention comprises a device for guiding a supply line (4), which is displaceable in a clamping device (A), for clamping and positioning an evaporator boat (3) having a base (22) and two spacer elements (18, 19) which moveably connect the displaceable supply line (4) to the base (22), the spacer elements (18, 19) being arranged on in each case one side with the displaceable supply line (4) and with the in each case other side on the base (22), thereby permitting restricted guidance of the first supply line (4), and the spacer elements (18, 19) being of such a length and arranged in such a manner between the first supply line (4) and the base (22) that the guide device (B) is substantially parallel to the clamping device (A) at least over a small range of deflection of the spacer elements (18, 19).
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