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Clamping device and positioning BATH EVAPORATOR

机译:夹紧装置和定位BATH EVAPORATOR

摘要

The invention relates to a vacuum treatment plant having an evaporator (1) for vacuum coating plants. The evaporator (1) according to the invention comprises a device for guiding a supply line (4), which is displaceable in a clamping device (A), for clamping and positioning an evaporator boat (3) having a base (22) and two spacer elements (18, 19) which moveably connect the displaceable supply line (4) to the base (22), the spacer elements (18, 19) being arranged on in each case one side with the displaceable supply line (4) and with the in each case other side on the base (22), thereby permitting restricted guidance of the first supply line (4), and the spacer elements (18, 19) being of such a length and arranged in such a manner between the first supply line (4) and the base (22) that the guide device (B) is substantially parallel to the clamping device (A) at least over a small range of deflection of the spacer elements (18, 19).
机译:真空处理设备技术领域本发明涉及一种具有用于真空涂覆设备的蒸发器(1)的真空处理设备。根据本发明的蒸发器(1)包括用于引导供应管线(4)的装置,该供应管线可在夹紧装置(A)中移动,以夹紧和定位具有基座(22)和两个的蒸发器船(3)。间隔元件(18、19)将可移动的供应管线(4)可移动地连接到基座(22),间隔元件(18、19)分别在一侧与可移动的供应管线(4)一起布置,并且分别在基座(22)上的另一侧,从而允许对第一供应管线(4)进行限制引导,并且间隔元件(18、19)具有这样的长度,并以这种方式布置在第一供应之间从线(4)和基部(22)可以看出,导向装置(B)至少在间隔元件(18、19)的较小偏转范围内基本平行于夹紧装置(A)。

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