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OPTICAL COATING BASED ON CARBON NANOTUBES FOR OPTICAL INSTRUMENT MAKING AND NANO-ELECTRONICS
OPTICAL COATING BASED ON CARBON NANOTUBES FOR OPTICAL INSTRUMENT MAKING AND NANO-ELECTRONICS
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机译:基于碳纳米管的光学膜制备及纳米电子
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摘要
FIELD: physics; optics.;SUBSTANCE: present invention relates to optical instrument making, space, laser optics, quantum and optical nano-electronics, and can also be used in display and television technology, where there is requirement for high transmission of optical coatings and elements in the visible and near infrared range. The optical coating is a thin-layer (100 nm or less) of carbon nanotubes with nanometer inhomogeneity. To deposit carbon nanotubes on a substrate, a slit-type CO2-laser is used, with controlled radiation power of the laser beam. Substrates made from glass, quartz, CaF2, BaF2, Si, Ge, GaAs and organic glass are used. The improved homogeneity of the coating, increased optical transmission (up to 87-90%) in a wide spectral range allows for reducing the number of layers of coating to just one, as well as reduction of the size of inhomogeneities to nanometers, and widening of the spectral range from the UV-range to the visible and infrared range.;EFFECT: improved optical transmission in the visible and infrared spectral ranges; increased mechanical and laser damage resistance of the optical coating.;2 dwg
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