METHOD OF MAKING QUARTZ-CRYSTAL RESONATORS WITH LINEAR TEMPERATURE-FREQUENCY CHARACTERISTIC

摘要

FIELD: electrical engineering.;SUBSTANCE: invention relates to the technology of making piezoelectric resonators and can be used for making quartz-crystal temperature sensitive piezoelectric sensors, used as precision measuring devices. The method involves depositing metal electrodes on the surface of an AT-cut piezoelectric plate, mounting the obtained piezoelectric element on a base, and tuning the resonance frequency of the piezoelectric resonator. After each operation thermal processing is done in isopropyl alcohol at liquid nitrogen temperature. After cooling the piezoelectric resonator is heated in a sealed capsule while letting in insulating gas under pressure.;EFFECT: improved manufacturing quality, simplification and low cost of the engineering process, increased yield ratio, provision for identity and repeatability of the temperature-frequency characteristic, with high linearity, during batch fabrication.;2 cl