Breaking-up device for stack of flat substrates has fan arranged so that meeting region of airflow on edge side of stack transverse to it is greater than fan diameter

摘要

The breaking-up device breaks up a stack (2) of substrates stacked along a stacking axis (3). A radial fan wheel (5) creates an airflow (7) to form an air cushion. The fan is arranged so that the meeting region of the airflow on edge side (21) of the stack transverse to it is greater than the diameter (d) of the fan wheel.