Field-guided planar precision drive for use with air-mounted rotor bearing permanent magnet circuit, has stator plate beneath rotor, and pairs of drive coils lying oppositely are provided on stator plate

摘要

The field-guided planar precision drive has a stator plate beneath the rotor, and pairs of drive coils (3) lying oppositely are provided on the stator plate. The stator plate has a linear guidance (5) for each pair of drive coils, in order to move the pairs of drive coils along the x or y axis of the coordinate system. The adjustment of a rotor (1) in x and y direction generates force component to the opposite pairs of drive coils.