piezoelectric actuator and piezoelectric actuator with a medium-resistant protective layer and a method for the production of the protective layer on the piezoelectric actuator

摘要

The module (3) for a of a medium and around which flow occurs arrangement, consisting of an actuator foot (5) and an actuator head (4) and at least one which is enclosed between the piezoelectric actuator (20) of piezoelectric elements (6) is described, which a protection layer system (24) of one or more functional layers, wherein a layer of an organic, medium-resistant gel (33) or elastomer with a the blocking effect of the gel (33) or elastomer at least with respect to for the piezoelectric actuator (20) harmful components of the medium improving aggregate (30, 31) is. In addition, a piezoelectric actuator (20) with a protection layer system (24) having at least one functional layer of an organic, medium-resistant gel (33) or an elastomer, which is provided with a the blocking effect of the gel (33) or of the elastomer at least with respect to for the piezoelectric actuator (20) harmful components of the medium improving aggregate (30, 31) is offset. In addition, a process for the increase in the barrier effect of a from an organic, medium-resistant gel (33) or elastomer layer of a protection layer system (24) of one or more functional layers, comprising the steps of:- The addition of a the blocking action of an organic, medium-resistant gel (33) or elastomer improving additions (30, 31), for example, an adsorbent on the basis of zeolites, to the organic, medium-resistant ..