Pressure sensor for determining pressure of hot or aggressive fluid media i.e. exhaust gas stream, in motor vehicle, has diaphragm with plastic connection and coated with additional material layer containing metalliferous components

摘要

The sensor (1) has a housing (4) surrounding a semiconductor element (3) and a pressure transducer (2). Pressure of a pressure chamber (10) is transferred to the transducer over a diaphragm (5). The housing is arranged such that the element does not stand in direct contact with the chamber. The diaphragm has a plastic connection, and is coated with an additional material layer (7) on a surface, which is turned towards the chamber. The layer contains metalliferous components. The diaphragm has an intermediate element (6) that is made of the plastic connection. An independent claim is also included for a method for manufacturing a pressure sensor with a pressure transducer.