Optical sensor for use in coating system i.e. physical vapor deposition system, has nozzle attached to optical receiver for directing gas flow to receiver, and optical transmitter for transmitting optical signal

摘要

The sensor (1) has an optical receiver (2) i.e. photodiode, for receiving an optical signal. A nozzle (8) is attached to the optical receiver for directing gas flow (10) to the optical receiver. An optical transmitter i.e. LED, is provided for transmitting the optical signal. The optical receiver is arranged in an optical path of the light emitted by the optical transmitter. Another nozzle (8) is attached to the optical transmitter for directing the gas flow towards the optical transmitter. The receiver is connected to an evaluation unit via a cable (3). An independent claim is also included for a method for cleaning an optical sensor arranged in a coating system.