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Polysilicon break, comprises similar structure grown in siemens process, where structure contains pores, splices, fissures, crack and chasms
Polysilicon break, comprises similar structure grown in siemens process, where structure contains pores, splices, fissures, crack and chasms
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机译:多晶硅断裂,包括在西门子过程中生长的相似结构,该结构中包含孔,接头,裂缝,裂缝和裂口
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摘要
The polysilicon break comprises a similar structure grown in the siemens process. The structure contains pores, splices, fissures, crack and chasms with 1-250 mms of break dimensions distribution and 0.7-1.0 of sphericity. An independent claim is also included for a method for manufacturing polysilicon break, which involves carrying out a cleaning of the silicon break in an oxidized washing solution.
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