首页> 外国专利> Optical arrangement for e.g. projection lens, has structure for optimizing arrangement with respect to angle of incident angle-dependent polarization division in phase and amplitude, and another structure compensating change of wave front

Optical arrangement for e.g. projection lens, has structure for optimizing arrangement with respect to angle of incident angle-dependent polarization division in phase and amplitude, and another structure compensating change of wave front

机译:光学装置投影透镜,具有用于在相位和振幅方面对入射角相关的偏振划分的角度进行优化布置的结构,以及另一种补偿波前变化的结构

摘要

The arrangement (1) has a coating (3) with a correction structure (6) that locally changes optical path length and/or intensity of a light coming through the coating. The structure is designed for realizing local optimization of the arrangement with respect to an angle of incident angle-dependent polarization division in phase and amplitude and transmission change. A wave front of the light coming through the coating is changed. Another correction structure (7) formed on a surface (4) of an element body (2) and compensates change of the wave front caused by the former structure. Independent claims are also included for the following: (1) a method for manufacturing an optical element (2) a method for optimizing an optical imaging system.
机译:装置(1)具有涂层(3),该涂层(3)具有校正结构(6),该校正结构(6)局部改变通过涂层的光路长度和/或光强度。该结构被设计用于相对于入射角相关的偏振角在相位和幅度以及透射率变化方面实现装置的局部优化。穿过涂层的光的波前改变了。另一校正结构(7)形成在元件本体(2)的表面(4)上,并补偿由前一结构引起的波前变化。还包括以下各项的独立权利要求:(1)一种制造光学元件的方法(2)一种用于优化光学成像系统的方法。

著录项

  • 公开/公告号DE102008041144A1

    专利类型

  • 公开/公告日2009-03-05

    原文格式PDF

  • 申请/专利权人 CARL ZEISS SMT AG;

    申请/专利号DE20081041144

  • 发明设计人 GRUNER TORALF;

    申请日2008-08-11

  • 分类号G02B27/28;G02B27/62;G02B1/10;G03F7/20;

  • 国家 DE

  • 入库时间 2022-08-21 19:09:05

相似文献

  • 专利
  • 外文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号