Optical element's e.g. mirror, surface processing method for microlithography, involves radiating fluid in form of fluid beam on surface of optical element which is processed, and moving fluid beam and surface freely in area

摘要

The method involves radiating fluid e.g. liquid and gas, in a form of a fluid beam (3) on a surface of an optical element, which is processed. The fluid beam and the surface are moved freely in the area, in six degrees of freedom to each other. The fluid beam is delivered by a stationarily arranged or movable nozzle (2), where fluid covers abrasive components comprising corundum, quartz, diamond, metals, metallic oxides, glass or ceramics. The optical element is designed in a fixed or movable manner. An independent claim is also included for a device for surface processing of optical elements.