process for the production of a multipollinse, multipollinse and equipped teilchenstrahlapparat

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a multipolar lens capable of manufacturing with efficiency by use of a simple technique.;SOLUTION: In the manufacturing method of the multipolar lens provided with a plurality of poles (magnetic poles) 23 each with a retained part 22c, an annular retaining member 25 with a through-hole 25a formed for retaining the retained part 22c of the pole 23, and an annular yoke magnetically coupling with a base end part of the pole 23, resin 24 is injected into the through-hole 25a of the retaining member 25 through an opening 32 communicating inside the through-hole 25a formed in the retaining member 25, and by hardening the resin 24 injected, the retained part 22c of the pole 23 is fixed to the retaining member 25 inside the through-hole 25a.;COPYRIGHT: (C)2005,JPO&NCIPI