SPENDING REQUIREMENTS FOR CHEMICALS WITH AIR-AIR SYSTEMS USING DIFFERENT AIR-AIR TECHNOLOGIES

摘要

PPROBLEM TO BE SOLVED: To provide a chemical delivery system having a purge system, with respect to a system or a manifold for delivering, transporting, supplying or feeding the chemical from a bulk delivery canister to a manufacturing process tool such as a chemical-vapor deposition device (CVD) and the like, more specifically to a process tool utilized in manufacturing an integrated circuit. PSOLUTION: The chemical delivery system (500) is disclosed based on the purge technology using various kinds of combinations of a medium-level vacuum source, a hard vacuum source, and/or a liquid flush system (506). Further, the delivery system is also equipped with a heater system for heating the chemical delivery system. PCOPYRIGHT: (C)2010,JPO&INPIT