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VIBRATION MODE SENSOR FILM, VIBRATION MODE ACTUATOR FILM, AND VIBRATION SUPPRESSION FILM
VIBRATION MODE SENSOR FILM, VIBRATION MODE ACTUATOR FILM, AND VIBRATION SUPPRESSION FILM
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机译:振动模式传感器膜,振动模式执行器膜和振动抑制膜
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摘要
PROBLEM TO BE SOLVED: To detect a specific vibration mode, to perform driving for canceling the specific vibration mode, and to reduce the thickness.;SOLUTION: A vibration suppression system 40 includes a vibration suppression film 41 and a control section 42. The vibration suppression film 41 includes a vibration mode sensor film 12, a vibration mode actuator film 31, and an insulated layer 43. The vibration mode sensor film 12 and the vibration mode actuator film are stacked so that an electrode is formed in a pattern based on the specific vibration mode and electrodes 15A, 15B, 16A and 16B of the vibration mode sensor film 12 and electrodes 33A, 33B, 34A and 34B of the vibration mode actuator film 31 overlap each other. The specific vibration mode is detected based on charge signals from the electrodes 15A, 15B, 16A and 16B, and vibration having the reverse phase is excited by voltage application of the electrodes 33A, 33B, 34A and 34B.;COPYRIGHT: (C)2010,JPO&INPIT
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