LASER ULTRASONIC INSPECTION METHOD USING THERMOELASTIC EFFECT OF LASER PULSE BEAM

摘要

PROBLEM TO BE SOLVED: To provide a laser ultrasonic inspection method for measuring ultrasonic waves at the optimal efficiency by increasing an ultrasonic signal strength at a measurement point as the ultrasonic waves are generated by using a thermoelastic effect for preventing a surficial damage from being generated.;SOLUTION: In the laser ultrasonic inspection method by using the pulse laser beam so as to generate the ultrasonic waves in a workpiece, a surface of the workpiece is irradiated with a plurality of pulse laser spots 3 triangularly or circularly arrayed, or a ring-like pulse laser spot. The ultrasonic waves are generated in the workpiece by the thermoelastic effect. The laser ultrasonic inspection method is provided, and characterized by measuring the ultrasonic waves in the center of a regular polygon, a circle or a ring, and using an ultrasonic superposition effect at the measurement point 10.;COPYRIGHT: (C)2011,JPO&INPIT