METHOD FOR SETTING CONTACT PARAMETER, PROGRAM FOR SETTING CONTACT PARAMETER, AND RECORDING MEDIUM RECORDING THE PROGRAM FOR SETTING CONTACT PARAMETER

摘要

PROBLEM TO BE SOLVED: To provide a method for setting the contact parameters, which can entirely simulate the contact process of devices of a semiconductor wafer with probes by setting the contact parameters while checking them visually.;SOLUTION: The method for setting the contact parameters includes a step of preparing a coordinate diagram 1 including the time axis and the height axis, and a second step of specifying a plurality of elevating and lowering positions of the semiconductor wafer on the coordinate diagram 1 while each electrode pad of the semiconductor wafer and a plurality of probes come in contact and separate electrically, and the elevating and lowering times of the semiconductor wafer required for reaching these elevating and lowering positions, respectively, and then setting the contact parameters of the semiconductor wafer by connecting a plurality of specifying points P by straight lines thereby indicating them as a graph of broken line.;COPYRIGHT: (C)2011,JPO&INPIT