MEASURING METHOD OF ION CONCENTRATION CHANGE LAYER, MEASURING DEVICE OF ION CONCENTRATION CHANGE LAYER, AND JOINING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a measurement method of an ion concentration change layer capable of measuring the thickness of the ion concentration change layer even if the ion concentration change layer is thin in thickness.;SOLUTION: A conjugant formed by joining a body to be joined and glass containing an ion is treated, and an observation face composed a face crossing wit the joining face of the body to be joined and the glass is formed. Next, a reflection electronic image of the observation face is generated (S10), and by adjusting that contrast of the reflection electronic image, the boundary line of the ion concentration change layer formed on a part facing the joining face on the glass is visualized on the reflection electron image (S20).;COPYRIGHT: (C)2010,JPO&INPIT