LIQUEFIED HELIUM FILLING UNIT AND METHOD OF FILLING LIQUEFIED HELIUM

摘要

PROBLEM TO BE SOLVED: To prevent waste discharge of expensive helium to the atmosphere when filling liquefied helium in a Dewar vessel.;SOLUTION: A liquefied helium filling unit 101 is mounted to an opening of the Dewar vessel. A skirt 15a of a supply unit 14 is inserted to a flow pipe 103 of the liquefied helium filling unit 101 and liquefied helium is supplied from a supply pipe 17 of the supply unit 14. Increase in internal pressure along with vaporization of the liquefied helium within an inner vessel 2 of the Dewar vessel is suppressed, to enable filling without emitting helium gas within the inner vessel 2 to the outside.;COPYRIGHT: (C)2010,JPO&INPIT