SOLID SAMPLE MAKING APPARATUS, SOLID SAMPLE MAKING METHOD AND SAMPLE OBSERVING METHOD

摘要

PPROBLEM TO BE SOLVED: To suppress a change in the composition or structure of a specimen in solidification by suppressing the evaporation of a liquid sample from a discharge port and to enable the stable discharge of the specimen. PSOLUTION: The solid sample making apparatus includes solid sample making chambers (1-3), a stage (14), a specimen supply device (16) equipped with a discharge port for discharging the specimen and supplying the specimen to the surface of the stage by discharge operation and a cooler (13) for cooling the stage. This solid sample making apparatus which supplies the specimen to the surface of the cooled stage in the solid sample making chamber to solidify it includes a suction device (18) sucking the specimen from the discharge port in the state that the discharge port of the specimen supply device is shielded from the atmosphere in the solid sample making chamber in standby of the discharge operation of the specimen supply device. PCOPYRIGHT: (C)2010,JPO&INPIT