RADIATION SENSITIVE RESIN COMPOSITION FOR FORMING WIRING PARTITION, WIRING PARTITION, AND ITS FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition for forming wiring partitions having sufficient resolution, wide exposure margin, and excellent flattening performance, maintaining high transparency even when being passed through a high temperature heating process and hardly secularly deteriorating metal wiring.;SOLUTION: The radiation sensitive resin composition contains (A) polysiloxane obtained by poly-condensing (a-1) 50-99 wt.% of an alkoxy silane compound having an aryl group, (a-2) 1-45 wt.% of a silane compound having an alkyl group, and (a-3) 0-5 wt.% of the other alkoxy silane compound, and (B) a compound generating acid by receiving irradiation of radiation.;COPYRIGHT: (C)2010,JPO&INPIT