STAINLESS FOIL CLADDED WITH SILICA-BASED INORGANIC POLYMER FILM, AND SILICON THIN FILM SOLAR CELL USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a stainless foil cladded with a silica-based inorganic polymer film, which ensures insulation in the order of not less than 1 MΩ cm², thermal stability, and manufacturing of a rear side reflective layer having an uneven texture structure as a thin film solar cell.;SOLUTION: A stainless foil, which is used as an insulating substrate for a solar cell, is cladded with a silica-based inorganic polymer film that uses siloxane bond as a main constituent. At least a part of Si that composes the silica-based inorganic polymer film forms a chemical bond with either or both of organic group or/and hydrogen, and the front surface of the silica-based inorganic polymer film has an uneven silica-based inorganic polymer structure, wherein such an uneven structure has a surface roughness Ra of at least 0.1 μm but at most 0.8 μm. A silicon thin film solar cell using the stainless foil is also provided.;COPYRIGHT: (C)2010,JPO&INPIT