MICRO VALVE, ITS MANUFACTURING METHOD, AND OPENING/CLOSING DETECTING METHOD OF MICRO VALVE

摘要

PROBLEM TO BE SOLVED: To provide a micro valve reliably detecting an opening/closing trouble when a trouble occurs in opening/closing a valve body owing to a foreign matter, etc.;SOLUTION: A diaphragm 12 serves concurrently as a first electrode (movable electrode) comprising an opening/closing detection means 26. A second electrode (fixed electrode) 28 comprising the opening/closing detection means 26 is formed in a position facing the diaphragm 12 in a groove section 22 of a second substrate 20.;COPYRIGHT: (C)2010,JPO&INPIT