ELECTROSTATIC CAPACITANCE TYPE DIAPHRAGM VACUUM GAGE, AND VACUUM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type diaphragm vacuum gage for highly accurately measuring pressure independently from attaching conditions of the vacuum gages.;SOLUTION: There is provided an inclined angle sensor 14 for detecting an inclined angle of the electrostatic capacitance type diaphragm vacuum gage 100. Electrostatic capacitance pressure dependency is stored to a storing part when the electrostatic capacitance type diaphragm vacuum gage 100 is attached to a vacuum device 2 at a first inclined angle (+90 degrees), a second inclined angle (0 degrees) and a third inclined angle (-90 degrees). Pressure measured values are corrected from inclined angle information detected with the inclined angle sensor 14, and electrostatic capacitance to pressure characteristics data are actually measured at the first to third inclined angles and stored.;COPYRIGHT: (C)2010,JPO&INPIT