ELECTRON SPIN DETECTOR, SPIN POLARIZATION SCANNING ELECTRON MICROSCOPE USING THE SAME, AND SPIN DECOMPOSED-LIGHT ELECTRON SPECTROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an electron spin detector capable of decomposing spin of an electron at high efficiency and unnecessitating acceleration of an electron beam at a 100 kV level and manufacturing at a compact size and inexpensively.;SOLUTION: The electron spin detector includes a plurality of magnetic resistance elements 504 and a deceleration lens 505 of the electron beam, and respective magnetic resistance elements 504 are arranged being inclined so as to make the electron beam spread by the deceleration lens 505 vertically incident.;COPYRIGHT: (C)2010,JPO&INPIT