MEASUREMENT CURRENT VALUE DETERMINING METHOD AND FOUR-PROBE RESISTIVITY MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for determining a current value of an electric current applied to a sample in order to obtain a voltage value required for measuring the sample in four-probe resistivity measurement.;SOLUTION: The measurement current value determining method for determining the value of the current applied to the sample in order to conduct measurement using a specified voltage value when measuring the electric resistance of the sample in the four-probe resistivity measurement includes stpes of: acquiring two sets of current values and voltage values which are measured results of the sample; deriving a linear equation: y=ax+b which connects coordinates of the two sets of current values and voltage values; calculating a current value y by substituting the specified voltage value into the variable x of the linear equation; measuring a voltage value by applying the calculated current value y to the sample; and determining the current value as a current value used for measuring the sample which corresponds to a voltage value which is measured when the measured voltage value is within an allowable range of the specified voltage value.;COPYRIGHT: (C)2010,JPO&INPIT